Resolution:

0,1 / 0,05 / 0,02 / 0,01 μm (A/B quadrature) or 0,4 μm (1 Vp-p)

Measuring length:

30 mm - 1.060 mm

Accuracy:

+/- 0,5; +/- 1,0; +/- 1,5 μm (depending on measuring length)

Output signal:

40 bit binary; Serial; A/B quadrature; Analogue (1 Vpp)

Signal pitch:

400 nm

Discontinued:

Advice: